Apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarization

ABSTRACT

Conditioning apparatuses and methods for conditioning polishing pads used for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, a method for conditioning a polishing pad used for polishing a micro-device workpiece includes monitoring surface condition in a first region of the polishing pad and adjusting at least one of a rotational velocity of the polishing pad, a downforce on the polishing pad, and a sweep velocity of the end effector in response to the monitored surface condition to provide a desired texture in the first region. In another embodiment, an apparatus for conditioning the polishing pad includes an end effector, a monitoring device, and a controller operatively coupled to the end effector and the monitoring device. The controller has a computer-readable medium containing instructions to perform a conditioning method, such as the above-mentioned method.

TECHNICAL FIELD

The present invention relates to an apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarization of micro-device workpieces.

BACKGROUND

Mechanical and chemical-mechanical planarization processes (collectively “CMP”) remove material from the surface of micro-device workpieces in the production of microelectronic devices and other products. FIG. 1 schematically illustrates a rotary CMP machine 10 with a platen 20, a carrier head 30, and a planarizing pad 40. The CMP machine 10 may also have an under-pad 25 between an upper surface 22 of the platen 20 and a lower surface of the planarizing pad 40. A drive assembly 26 rotates the platen 20 (indicated by arrow F) and/or reciprocates the platen 20 back and forth (indicated by arrow G). Since the planarizing pad 40 is attached to the under-pad 25, the planarizing pad 40 moves with the platen 20 during planarization.

The carrier head 30 has a lower surface 32 to which a micro-device workpiece 12 may be attached, or the workpiece 12 may be attached to a resilient pad 34 under the lower surface 32. The carrier head 30 may be a weighted, free-floating wafer carrier, or an actuator assembly 36 may be attached to the carrier head 30 to impart rotational motion to the micro-device workpiece 12 (indicated by arrow J) and/or reciprocate the workpiece 12 back and forth (indicated by arrow 1).

The planarizing pad 40 and a planarizing solution 44 define a planarizing medium that mechanically and/or chemically-mechanically removes material from the surface of the micro-device workpiece 12. The planarizing solution 44 may be a conventional CMP slurry with abrasive particles and chemicals that etch and/or oxidize the surface of the micro-device workpiece 12, or the planarizing solution 44 may be a “clean” nonabrasive planarizing solution without abrasive particles. In most CMP applications, abrasive slurries with abrasive particles are used on nonabrasive polishing pads, and clean nonabrasive solutions without abrasive particles are used on fixed-abrasive polishing pads.

To planarize the micro-device workpiece 12 with the CMP machine 10, the carrier head 30 presses the workpiece 12 face-down against the planarizing pad 40. More specifically, the carrier head 30 generally presses the micro-device workpiece 12 against the planarizing solution 44 on a planarizing surface 42 of the planarizing pad 40, and the platen 20 and/or the carrier head 30 moves to rub the workpiece 12 against the planarizing surface 42. As the micro-device workpiece 12 rubs against the planarizing surface 42, the planarizing medium removes material from the face of the workpiece 12.

The CMP process must consistently and accurately produce a uniformly planar surface on the micro-device workpiece 12 to enable precise fabrication of circuits and photo-patterns. One problem with conventional CMP methods is that the planarizing surface 42 of the planarizing pad 40 can wear unevenly or become glazed with accumulations of planarizing solution 44 and/or material removed from the micro-device workpiece 12 and/or planarizing pad 40. To restore the planarizing characteristics of the planarizing pad 40, the pad 40 is typically conditioned by removing the accumulations of waste matter with an abrasive conditioning disk 50. The conventional abrasive conditioning disk 50 is generally embedded with diamond particles and mounted to a separate actuator 55 that moves the conditioning disk 50 rotationally, laterally, and/or axially, as indicated by arrows A, B, and C, respectively. The typical conditioning disk 50 removes a thin layer of the planarizing pad material in addition to the waste matter to form a new, clean planarizing surface 42 on the planarizing pad 40.

During the conditioning process, the conditioning disk 50 imparts texture to the planarizing pad 40. One problem with conventional conditioning methods is that even if the conditioning disk 50 uniformly removes the planarizing pad material, different textures are formed across the planarizing pad 40. Differences in texture across the planarizing pad 40 can cause the pad 40 to remove material at different rates across the micro-device workpiece 12 during the CMP process. Differences in texture can also produce defects on the micro-device workpiece 12. Consequently, the CMP process may not produce a uniformly planar surface on the micro-device workpiece 12.

SUMMARY

The present invention is directed toward conditioning apparatuses and methods for conditioning polishing pads used for mechanical and/or chemical-mechanical planarization of micro-device workpieces. In one embodiment, a method for conditioning a polishing pad includes determining surface condition in a first region of the polishing pad, determining surface condition in a second region of the polishing pad, and adjusting at least one of a relative velocity between the polishing pad and an end effector, an existing downforce on the polishing pad, and a sweep velocity of the end effector in response to the determined surface condition of the first region to provide a desired first surface texture in the first region. The method further includes adjusting at least one of the relative velocity between the polishing pad and the end effector, the existing downforce on the polishing pad, and the sweep velocity of the end effector in response to the determined surface condition of the second region to provide a desired second surface texture in the second region. In a further aspect of this embodiment, determining surface condition can include sensing surface texture, roughness, and/or asperities. In another aspect of this embodiment, determining surface condition can occur while the polishing pad is in-situ, rotating, and/or stationary.

In another embodiment of the invention, a method for conditioning the polishing pad includes monitoring surface condition in the first region of the polishing pad and adjusting at least one of a rotational velocity of the polishing pad, the downforce on the polishing pad, and the sweep velocity of the end effector in response to the monitored surface condition to provide the desired texture in the first region.

In another embodiment of the invention, an apparatus for conditioning the polishing pad includes an end effector, a monitoring device, and a controller operatively coupled to the end effector and the monitoring device. In one aspect of this embodiment, the controller has a computer-readable medium containing instructions to perform a method including determining surface condition in the first region of the polishing pad, determining surface condition in the second region of the polishing pad, and adjusting at least one of the relative velocity between the polishing pad and the end effector, the existing downforce on the polishing pad, and the sweep velocity of the end effector in response to the determined surface condition of the first region to provide the desired first surface texture in the first region. The method further includes adjusting at least one of the relative velocity between the polishing pad and the end effector, the existing downforce on the polishing pad, and the sweep velocity of the end effector in response to the determined surface condition of the second region to provide a desired second surface texture in the second region.

In another aspect of this embodiment, the controller has a computer-readable medium containing instructions to perform a method including monitoring surface condition in the first region of the polishing pad, and adjusting at least one of the rotational velocity of the polishing pad, the downforce on the polishing pad, and the sweep velocity of the end effector in response to the monitored surface condition to provide the desired texture in the first region.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view of a portion of a rotary planarizing machine and an abrasive conditioning disk in accordance with the prior art.

FIG. 2 is a schematic isometric view of a portion of a rotary planarizing machine and a conditioning system in accordance with one embodiment of the invention.

FIG. 3 is a side schematic view of the planarizing pad before conditioning.

FIG. 4 is a schematic view of a conditioning system with a monitoring device in accordance with another embodiment of the invention.

DETAILED DESCRIPTION

The present invention is directed to apparatuses and methods for conditioning polishing pads used for mechanical and/or chemical-mechanical planarization of micro-device workpieces. The term “micro-device workpiece” is used throughout to include substrates in and/or on which micro-electronic devices, micro-mechanical devices, data storage elements, and other features are fabricated. For example, micro-device workpieces can be semi-conductor wafers, glass substrates, insulated substrates, or many other types of substrates. Furthermore, the terms “planarization” and “planarizing” mean either forming a planar surface and/or forming a smooth surface (e.g., “polishing”). Several specific details of the invention are set forth in the following description and in FIGS. 2-4 to provide a thorough understanding of certain embodiments of the invention. One skilled in the art, however, will understand that the present invention may have additional embodiments, or that other embodiments of the invention may be practiced without several of the specific features explained in the following description.

FIG. 2 is a schematic isometric view of a conditioning system 100 in accordance with one embodiment of the invention. The conditioning system 100 can be coupled to a CMP machine 110 to refurbish a planarizing pad 140 or to bring a planarizing surface 142 of the planarizing pad 140 to a desired state for consistent planarizing. The CMP machine 110 can be similar to the CMP machine 10 discussed above. For example, the CMP machine 110 can include a carrier head 130 coupled to an actuator assembly 136 to move the workpiece (not shown) across the planarizing surface 142 of the planarizing pad 140.

In the illustrated embodiment, the conditioning system 100 includes a monitoring device 160, a controller 170, and an end effector 180. The end effector 180 can include an arm 182 and a conditioning disk 150 coupled to the arm 182 to exert a downforce F_(D) against the planarizing pad 140. The conditioning disk 150 is generally imbedded with diamond particles to remove waste matter and a thin layer of the planarizing pad 140. The conditioning disk 150 forms a new clean planarizing surface 142 on the planarizing pad 140. The conditioning disk 150 rotates (indicated by arrow A) with a rotational velocity ω₁ to abrade the planarizing pad 140 with the diamond particles. In the illustrated embodiment, the arm 182 can sweep the conditioning disk 150 across the planarizing surface 142 in a direction S with a sweep velocity S_(V). The sweep velocity S_(V) can change as the conditioning disk 150 moves across the planarizing surface 142 so that the disk 150 contacts different areas on the planarizing surface 142 for different dwell times. In the illustrated embodiment, the conditioning disk 150 conditions the planarizing pad 140 in-situ and in real-time with the planarization process. In other embodiments, conditioning and planarization may not occur concurrently.

The monitoring device 160 monitors the surface condition of the planarizing surface 142. For example, the monitoring device 160 can determine the surface texture, roughness, and/or asperities of the planarizing surface 142. The monitoring device 160 can be stationary or movable relative to the CMP machine 110 to monitor the entire planarizing surface 142 of the planarizing pad 140 when the pad 140 is stationary or while it rotates. In one embodiment, the monitoring device 160 can include an optical analyzer, such as an interferometer or a device that measures the scatter of light. In other embodiments, the monitoring device 160 can use contact methods, such as frictional forces, or profilometry to monitor the surface condition. In any of these embodiments, the monitoring device 160 can monitor a single region or a plurality of monitoring devices can monitor multiple regions on the planarizing pad 140 concurrently. For example, the planarizing surface 142 of the planarizing pad 140 can be analyzed by organizing the pad 140 into known regions, such as a first region R₁, a second region R₂, and a third region R₃. The monitoring device 160 can monitor the surface condition in the first, second, and third regions R₁, R₂, and R₃ simultaneously. In other embodiments, the monitoring device 160 may monitor only one region at a time. In still other embodiments, a single monitoring device could be movable to monitor more than one region.

The controller 170 is operatively coupled to a platen 120, the actuator assembly 136, the monitoring device 160, and the end effector 180 to control the conditioning process. The controller 170 controls the conditioning process by adjusting certain process variables to provide a desired surface texture across the planarizing pad 140. For example, the controller 170 can adjust the relative velocity between the planarizing pad 140 and the end effector 180, the downforce F_(D) of the end effector 180 on the planarizing pad 140, and/or the sweep velocity S_(V) of the end effector 180 to provide the desired texture on the planarizing surface 142. The controller 170 can adjust the relative velocity between the planarizing pad 140 and the end effector 180 by changing the speed at which the platen 120 rotates. Accordingly, the controller 170 regulates the conditioning process to provide a desired surface condition. In one embodiment, the controller 170 can include a computer; in other embodiments, the controller 170 can include a hardwired circuit board.

FIG. 3 is a side schematic view of the planarizing pad 140 having a nonuniform surface texture before conditioning. During planarization, the micro-device workpiece can wear down some or all of the planarizing pad 140. Furthermore, the planarizing pad 140 can become glazed with accumulations of planarizing solution and/or material removed from the micro-device workpiece and/or planarizing pad 140. The waste matter is especially problematic in applications that planarize borophosphate silicon glass or other relatively soft materials. In the illustrated embodiment, the second region R₂, which does most of the planarizing, has a glazed surface. The first region R₁, which does a fair amount of the planarizing per unit area, and the third region R₃, which does very little planarizing per unit area, both have worn surfaces. The planarizing pad 140 must accordingly be conditioned to return the planarizing surface 142 to a state that is acceptable for planarizing additional micro-device workpieces. Referring to FIGS. 2 and 3, to provide a uniform surface texture across the planarizing pad 140, for example, in the second region R₂ (relative to the first and third regions R₁ and R₃) at least one of the conditioning variables would need to change as follows: exert a greater downforce F_(D) by the end effector 180; increase rotational speed of the platen 120; and/or decrease the sweep velocity S_(V) of the arm 182.

Referring to FIG. 2, in operation, the monitoring device 160 monitors the planarizing surface 142 to detect differences in surface conditions, such as the surface texture, roughness, and/or asperities across the planarizing pad 140. If the monitoring device 160 detects, for example, a first texture T₁ in the first region R₁ and a second texture T₂ in the second region R₂, the controller 170 will adjust one or more conditioning variables in response to the signals received from the monitoring device 160 to provide a desired texture in the first region R₁ and/or the second region R₂. More specifically, the controller 170 will adjust the relative velocity between the planarizing pad 140 and the end effector 180, the downforce F_(D) of the end effector 180, and/or the sweep velocity S_(V) of the end effector 180 to provide a desired texture on the planarizing surface 142. The monitoring device 160 monitors the planarizing surface 142 throughout the conditioning process to detect differences in surface conditions, and the controller 170 adjusts at least one of the above-mentioned conditioning variables in response to the signals received from the monitoring device 160 to provide a desired texture on the planarizing pad 140.

In one embodiment, for example, the controller 170 can vary the dwell time D_(t) of the conditioning disk 150 and the platen's rotational velocity Ω to maintain a constant relative velocity V_(r) between the planarizing pad 140 and the conditioning disk 150 to provide a uniform surface texture across the pad 140. If the required relative velocity V_(r) is known, the platen's rotational velocity Ω_(R) at a radius R can be determined by the following formula: $\Omega_{R} = \frac{V_{r}}{2\pi\quad R}$

The dwell time D_(t(R)) of the conditioning disk 150 at the radius R can be determined by the following formula: $D_{t{(R)}} = \frac{\left( {C_{l}\pi\quad R} \right)}{r_{c}V_{r}}$

where C_(l) is the length of conditioning and r_(c) is the radius of the conditioning disk 150, assuming the required length of conditioning C_(l) is known. In other embodiments, the downforce F_(D) can be adjusted, such as when the conditioning disk 150 conditions the edge of the planarizing pad 140 and a portion of the disk 150 hangs over the pad 140.

FIG. 4 is a schematic view of a conditioning system 200 having a different monitoring device 260 in accordance with another embodiment of the invention. In the illustrated embodiment, the conditioning system 200 also includes the controller 170 and the end effector 180 described above. The monitoring device 260 includes an arm 262 extending downwardly toward the planarizing pad 140. When the arm 262 contacts the planarizing pad 140 and the arm 262 and/or the planarizing pad 140 move relative to each other, a frictional force F_(f) is generated. The monitoring device 260 measures the frictional force F_(f) between the arm 262 and the planarizing pad 140 to determine the surface condition of the planarizing surface 142. The frictional force F_(f) generally increases as the roughness of the planarizing pad 140 increases. In one embodiment, the monitoring device 260 can include a load cell that measures the frictional force F_(f). In other embodiments, strain gauges, pressure transducers, and other devices can be used to measure the frictional force F_(f). Suitable systems with strain gauges and pressure transducers for determining the drag force are disclosed in U.S. Pat. No. 6,306,008, which is herein incorporated by reference. In additional embodiments, the monitoring device 260 can be an integral portion of the end effector 180, measuring the frictional force F_(f) exerted on the end effector 180 by the planarizing pad 140.

One advantage of the conditioning systems in the illustrated embodiments is the ability to control both the surface texture and the surface contour in real-time throughout the conditioning cycle. For example, the conditioning systems can provide a first desired surface texture in a first region of the planarizing pad and a second desired surface texture in a second region of the pad. The conditioning systems can also provide a uniform surface texture across the planarizing pad so that material can be removed from a micro-device workpiece uniformly across the workpiece during the CMP process. A uniform surface texture can also reduce defects on the micro-device workpiece.

From the foregoing, it will be appreciated that specific embodiments of the invention have been described herein for purposes of illustration, but that various modifications may be made without deviating from the spirit and scope of the invention. Accordingly, the invention is not limited except as by the appended claims. 

1-53. (canceled)
 54. An apparatus for conditioning a polishing pad used for polishing a micro-device workpiece, comprising: an end effector; a monitoring device; and a controller operatively coupled to the end effector and the monitoring device, the controller having a computer-readable medium containing instructions to perform a method comprising: determining surface condition in a first region of the polishing pad; determining surface condition in a second region of the polishing pad; adjusting at least one of a relative velocity between the polishing pad and the end effector, an existing downforce on the polishing pad, and a sweep velocity of the end effector in response to the determined surface condition of the first region to provide a desired first surface texture in the first region; and adjusting at least one of the relative velocity between the polishing pad and the end effector, the existing downforce on the polishing pad, and the sweep velocity of the end effector in response to the determined surface condition of the second region to provide a desired second surface texture in the second region.
 55. The apparatus of claim 54 wherein the monitoring device comprises an optical analyzer.
 56. The apparatus of claim 54 wherein the monitoring device comprises a load cell configured to measure a frictional force in a plane defined by the polishing pad.
 57. The apparatus of claim 54 wherein the end effector comprises abrasive elements for abrading the polishing pad.
 58. The apparatus of claim 54 wherein the monitoring device is configured to sense the surface condition of the polishing pad.
 59. An apparatus for conditioning a polishing pad used for polishing a micro-device workpiece, comprising: an end effector; a sensor; and a controller operatively coupled to the end effector and the sensor, the controller having a computer-readable medium containing instructions to perform a method comprising: monitoring surface condition in a first region of the polishing pad; and adjusting at least one of a rotational velocity of the polishing pad, a downforce on the polishing pad, and a sweep velocity of the end effector in response to the monitored surface condition to provide a desired texture in the first region.
 60. The apparatus of claim 59 wherein the sensor comprises an optical sensor.
 61. The apparatus of claim 59 wherein the sensor comprises a load cell configured to measure a frictional force in a plane defined by the polishing pad.
 62. The apparatus of claim 59 wherein the sensor is configured to detect the surface condition of the polishing pad.
 63. The apparatus of claim 59 wherein the sensor is configured to continuously monitor the surface condition of the polishing pad.
 64. An apparatus for conditioning a polishing pad used for polishing a micro-device workpiece, comprising: an end effector; a means for sensing surface condition; and a controller operatively coupled to the end effector and the means for sensing, the controller having a computer-readable medium containing instructions to perform a method comprising: determining roughness of surface texture in a first region of the polishing pad; and controlling at least one of a rotational velocity of the polishing pad, a downforce on the polishing pad and a sweep velocity of the end effector in response to the determined roughness to provide a desired texture in the first region.
 65. The apparatus of claim 64 wherein the means for sensing comprises an optical analyzer.
 66. The apparatus of claim 64 wherein the means for sensing comprises a load cell configured to measure a frictional force in a plane defined by the polishing pad.
 67. An apparatus for conditioning a polishing pad used for polishing a micro-device workpiece, comprising: an end effector; a monitoring device; and a controller operatively coupled to the end effector and the monitoring device, the controller having a computer-readable medium containing instructions to perform a method comprising: engaging an end effector with the polishing pad and moving at least one of the end effector and the polishing pad relative to the other; monitoring surface condition in a first region of the polishing pad; and providing a desired texture in the first region of the polishing pad by regulating at least one of a relative velocity between the polishing pad and the end effector, a downforce on the polishing pad, and a sweep velocity of the end effector in response to the monitored surface condition of the first region.
 68. The apparatus of claim 67 wherein the monitoring device comprises an optical analyzer.
 69. The apparatus of claim 67 wherein the monitoring device comprises a load cell configured to measure a frictional force in a plane defined by the polishing pad. 